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Browsing by Author "Wako, Y."

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    Moore's Law meets High-NA EUV: Random via patterning for next-generation nodes

    Chowrira Poovanna, Bhavishya  
    ;
    Blanco, Victor  
    ;
    Dusa, Mircea  
    ;
    Tan, Ling Ee  
    ;
    Vats, H.
    Proceedings paper
    2025, 2025 Conference on Optical and EUV Nanolithography, 2025-04-22, p.1342412-1-1342412-7

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