Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Wang, James"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    CMP of a RU based layer in an advanced Cu low-k stack

    Vaes, Jan
    ;
    Sinapi, Fabrice
    ;
    Hernandez, Jose Luis  
    ;
    Santoro, Gaetano  
    ;
    Nguyen, Olivier
    ;
    Wang, James
    Proceedings paper
    2007-10, International Conference on Planarization CMP Technology - ICPT, 25/10/2007, p.43-48

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings