Publication:

CMP of a RU based layer in an advanced Cu low-k stack

Date

2007-10

Proceedings Paper

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Author(s)

;

Sinapi, Fabrice

;

Hernandez, Jose Luis

;

Santoro, Gaetano

;

Nguyen, Olivier

;

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2009 since deposited on 2021-10-16

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Acq. date: 2026-02-25