Publication:
CMP of a RU based layer in an advanced Cu low-k stack
Date
| dc.contributor.author | Vaes, Jan | |
| dc.contributor.author | Sinapi, Fabrice | |
| dc.contributor.author | Hernandez, Jose Luis | |
| dc.contributor.author | Santoro, Gaetano | |
| dc.contributor.author | Nguyen, Olivier | |
| dc.contributor.author | Wang, James | |
| dc.contributor.imecauthor | Hernandez, Jose Luis | |
| dc.contributor.imecauthor | Santoro, Gaetano | |
| dc.date.accessioned | 2021-10-16T20:22:54Z | |
| dc.date.available | 2021-10-16T20:22:54Z | |
| dc.date.issued | 2007-10 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13008 | |
| dc.source.beginpage | 43 | |
| dc.source.conference | International Conference on Planarization CMP Technology - ICPT | |
| dc.source.conferencedate | 25/10/2007 | |
| dc.source.conferencelocation | Dresden Germany | |
| dc.source.endpage | 48 | |
| dc.title | CMP of a RU based layer in an advanced Cu low-k stack | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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