Browsing by Author "Wang, Jin"
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Publication Characterization of directed self-assembly process using grazing incidence small angle X-ray scattering
Oral presentation2014, SPIE Advanced Lithography ConferencePublication Characterization of the shape and line-edge roughness of polymer gratings with grazing incidence small-angle X-ray scattering and atomic force microscopy
Journal article2016, Journal of Applied Crystallography, 49, p.823-834Publication Grazing-incidence small angle x-ray scattering studies of nanoscale polymer gratings
Proceedings paper2015, Metrology, Inspection, and Process Control for Microlithography XXIX, 22/02/2015, p.94241NPublication The nucleation of ALD HfO2 films, and evolution of their morphology, studied by grazing incidence small angle x-ray scattering by synchroton radiation
Proceedings paper2004, Atomic Layer Deposition Conference, 16/08/2004