Browsing by Author "Wang, Sharon"
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Publication Development of a non-destructive thin film porosimetry: pore size distribution and pore volume of porous silica
Proceedings paper1999, Advanced Metallization Conference in 1998. Proceedings of the Conference;, p.507-512Publication Integration of non-etchback low-k methy silsequioxane polymer using electron beam cure
Proceedings paper1999, Advanced Metallization Conference in 1998 - AMC 1998, 6/10/1998, p.491-497