Browsing by Author "Wang, T. S."
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Publication Cluster formation during annealing of ultra-low-energy boron-implanted silicon
;Collart, E. J. H. ;Murrell, A. J. ;Foad, M. A. ;van den Berg, J. A. ;Zhang, S. ;Armour, D.Goldberg, R. D.Journal article2000, J. Vacuum Science and Technology B, (B18) 1, p.435-439