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Browsing by Author "Wang, T. S."

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    Cluster formation during annealing of ultra-low-energy boron-implanted silicon

    Collart, E. J. H.
    ;
    Murrell, A. J.
    ;
    Foad, M. A.
    ;
    van den Berg, J. A.
    ;
    Zhang, S.
    ;
    Armour, D.
    ;
    Goldberg, R. D.
    Journal article
    2000, J. Vacuum Science and Technology B, (B18) 1, p.435-439

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