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Browsing by Author "Wang, W. C."

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    Considerations for further scaling of metal–insulator–metal DRAM capacitors

    Kaczer, Ben  
    ;
    Clima, Sergiu  
    ;
    Tomida, Kazuyuki  
    ;
    Govoreanu, Bogdan  
    ;
    Popovici, Mihaela Ioana  
    Journal article
    2013, Journal of Vacuum Science and Technology B, (31) 1, p.01A105
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    Gadolinium-niobates and -tantalates: amorphous high-k materials by aqueous CSD

    Dewulf, Daan
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    Hardy, An  
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    Van Elshocht, Sven  
    ;
    De Dobbelaere, C.
    ;
    Wang, W. C.
    ;
    Badylevich, M.
    Journal article
    2012-04, Journal of the Electrochemical Society, (159) 6, p.G75-G79
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    Investigation of leakage mechanisms in ALD Sr-rich SrTiO films

    Kaczer, Ben  
    ;
    Wang, W. C.
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    Afanasiev, Valeri  
    ;
    Pawlak, Malgorzata
    ;
    Kim, Min-Soo  
    ;
    Tomida, Kazuyuki  
    Proceedings paper
    2010, 41st IEEE Semiconductor Interface Specialists Conference- SISC, 2/12/2010

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