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Browsing by Author "Wang, Yanni"

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    Effect of deposition methods on material removal rate during nickel CMP

    Wang, Yanni
    ;
    Teugels, Lieve  
    ;
    Vandersmissen, Kevin  
    ;
    De Gendt, Stefan  
    ;
    Krishnan, Sitaraman
    Proceedings paper
    2017-10, International Conference on Planarization/CMP Technology - ICPT, 11/10/2017
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    Publication

    Effect of deposition methods on material removal rate during nickel CMP

    Wang, Yanni
    ;
    Teugels, Lieve  
    ;
    Vandersmissen, Kevin  
    ;
    De Gendt, Stefan  
    ;
    Struyf, Herbert  
    Meeting abstract
    2017-10, International Conference on Planarization/CMP Technology - ICPT, 11/10/2017

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