Publication:

Effect of deposition methods on material removal rate during nickel CMP

Date

2017-10

Proceedings Paper

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Author(s)

;

;

Vandersmissen, Kevin

;

De Gendt, Stefan

;

Krishnan, Sitaraman

;

Struyf, Herbert

Metrics

1926 since deposited on 2021-10-24

Acq. date: 2025-12-13