Browsing by Author "Watanabe, Mitsuhiro"
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Publication Paths towards low-damage etching of highly porous organo-silicate low-k dielectrics
Oral presentation2016, SPIE Advanced Lithography ConferencePublication Pore surface grafting of porous low-k dielectrics by selective polymers
Meeting abstract2016, Plasma Etch and Strip in Microtechnology - PESM, 5/09/2016Publication Pore surface grafting of porous low-k dielectrics by selective polymers
Journal article2017, Journal of Vacuum Science and Technology B, (25) 2, p.21211