Browsing by Author "Wen, Liangong"
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Publication A parylene temporary packaging technique for MEMS wafer handling
Journal article2011, Procedia Engineering, 25, p.1501-1504Publication Thin film encapsulated SiGe accelerometer for MEMS above IC integration
Proceedings paper2011, 16th International Conference on Solid-State Sensors, Actuators, and Microsystems - Transducers, 5/06/2011, p.2046-2049