Browsing by Author "Wennrich, L."

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Effect of pressure on efficiency of UV curing of CVD low-k material at different wavelengths

Prager, Lutz
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Naumov, Sergei
;
Pistol, L.
;
Wennrich, L.
;
Buchmeister, M. R.
;
Marsik, Premysl
Meeting abstract
2008, 17th Workshop Materials for Advanced Metallization, 2/03/2008
Effect of pressure on efficiency of UV curing of CVD-derived low-k material at different wavelengths

Prager, L.
;
Marsik, Premysl
;
Wennrich, L.
;
Baklanov, Mikhaïl
;
Naumov, S.
;
Pistol, L.
;
Schneider, D.
Journal article
2008, Microelectronic Engineering, (85) 10, p.2094-2097