Browsing by Author "Werbrouck, Andreas"

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Atomic Layer Deposition of Boron-Containing Layers Using a Combined Trimethylborate- and Water-Based Plasma

Dhara, Arpan
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Werbrouck, Andreas
;
Li, Jin
;
Verhelle, Tippi
;
Minjauw, Matthias M.
Journal article
2025-APR 22, CHEMISTRY OF MATERIALS
Atomic Layer Deposition of Ruthenium Dioxide Based on Redox Reactions between Alcohols and Ruthenium Tetroxide

Poonkottil, Nithin
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Minjauw, Matthias M.
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Werbrouck, Andreas
;
Checchia, Stefano
Journal article
2022-09-21, CHEMISTRY OF MATERIALS, (34) 19, p.8946-8958
Converting molecular layer deposited alucone films into Al2O3/alucone hybrid multilayers by plasma densification

Penaranda, Juan Santo Domingo
;
Nisula, Mikko
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Vandenbroucke, Sofie
;
Minjauw, Matthias M.
Journal article
2021, DALTON TRANSACTIONS, (50) 4