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Browsing by Author "Wernicke, Tobias"

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    Investigation on the use of Al-Ge eutectic bonding in the structure part of a multilayer stacked MEMS device

    Wang, Jun  
    ;
    Mannarino, Manuel  
    ;
    Visker, Jakob  
    ;
    Kang, Shuo  
    ;
    Weidlinger, Gunther
    ;
    Wernicke, Tobias
    Proceedings paper
    2024, IEEE 74th Electronic Components and Technology Conference (ECTC), MAY 28-31, 2024, p.2008-2012

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