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Investigation on the use of Al-Ge eutectic bonding in the structure part of a multilayer stacked MEMS device
Publication:
Investigation on the use of Al-Ge eutectic bonding in the structure part of a multilayer stacked MEMS device
Date
2024
Proceedings Paper
https://doi.org/10.1109/ECTC51529.2024.00342
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Wang, Jun
;
Mannarino, Manuel
;
Visker, Jakob
;
Kang, Shuo
;
Weidlinger, Gunther
;
Wernicke, Tobias
;
Burggraf, Jurgen
;
Wimplinger, Markus
Journal
N/A
Abstract
Description
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Views
236
since deposited on 2024-12-07
Acq. date: 2025-10-25
Citations
Metrics
Views
236
since deposited on 2024-12-07
Acq. date: 2025-10-25
Citations