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Browsing by Author "Whelan, S."

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    High depth resolution characterization of the damage and annealing behaviour of ultrashallow As-implants in Si

    van den Berg, J.A.
    ;
    Armour, D.G.
    ;
    Werner, M.
    ;
    Whelan, S.
    ;
    Vandervorst, Wilfried  
    ;
    Clarysse, Trudo
    Proceedings paper
    2002, Proceedings 14th International Conference on Ion Implantation Technology Conference, 22/09/2002, p.597-600

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