Browsing by Author "White, Daniela"
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Publication Mechanistic and electrochemical aspects of copper and cobalt post CMP cleaners for 5-7 nm nodes
Proceedings paper2017, Surface Preparation and Cleaning Conference - SPCC, 28/03/2017, p.267-274Publication Post-CMP cleaners for tungsten advanced nodes: 10 nm and 7 nm
Proceedings paper2017-10, International Conference on Planarization Technology - ICPT, 11/10/2017Publication Post-CMP cleaners for tungsten at advanced nodes
Proceedings paper2016, Ultra Clean Processing of Semiconductor Surfaces XIII - UCPSS, 11/09/2016