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Browsing by Author "Wickramanayaka, Sunil"

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    Integration of PVD ruthenium as a pMOS metal gate in scaled planar devices: workfunction and electrical performance on HfO2

    Deweerd, Wim
    ;
    Schram, Tom  
    ;
    Van Hoornick, Nausikaa  
    ;
    Witters, Thomas  
    ;
    Lisoni, Judit
    ;
    Rohr, Erika
    Proceedings paper
    2005, 4th International Conference on Semiconductor Technology - ISTC, 14/03/2005, p.62-71

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