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    Molecular glass resists for scanning probe lithography

    Neuber, Christian
    ;
    Ringk, Andreas
    ;
    Kolb, Tristan
    ;
    Wieberger, Floryan
    ;
    Strohriegl, Peter
    Proceedings paper
    2014, Alternative Lithographic Technologies VI, 23/02/2014, p.90491V

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