Browsing by Author "Wilhelm, H."
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Publication Critical processes for ultra-thin gate oxide integrity
;Depas, Michel; ;Nigam, Tanya; ; ;Wilhelm, H.Wilhelm, RudiProceedings paper1996, Proceedings of the 3rd International Symposium on the Physics and Chemistry of SiO2 and the SiO2 Interface, 5/05/1996, p.352-366