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Browsing by Author "Wilhelm, H."

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    Critical processes for ultra-thin gate oxide integrity

    Depas, Michel
    ;
    Heyns, Marc  
    ;
    Nigam, Tanya
    ;
    Kenis, Karine  
    ;
    Sprey, Hessel  
    ;
    Wilhelm, H.
    ;
    Wilhelm, Rudi
    Proceedings paper
    1996, Proceedings of the 3rd International Symposium on the Physics and Chemistry of SiO2 and the SiO2 Interface, 5/05/1996, p.352-366

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