Browsing by Author "Wilk, G. D."
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Publication Improved film growth and flatband voltage control of ALD HfO2 and Hf-Al-O with n+ poly-si gates using chemical oxides and optimized post-annealing
;Wilk, G. D. ;Green, Martin ;M.-Y., Ho ;Busch, B. W. ;Sorsch, T. W. ;Klemens, F. P.Brijs, BertProceedings paper2002, Symposium on VLSI Technology: Digest of Technical Papers, 11/06/2002, p.88-9