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Browsing by Author "Wilk, G. D."

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    Improved film growth and flatband voltage control of ALD HfO2 and Hf-Al-O with n+ poly-si gates using chemical oxides and optimized post-annealing

    Wilk, G. D.
    ;
    Green, Martin
    ;
    M.-Y., Ho
    ;
    Busch, B. W.
    ;
    Sorsch, T. W.
    ;
    Klemens, F. P.
    ;
    Brijs, Bert
    Proceedings paper
    2002, Symposium on VLSI Technology: Digest of Technical Papers, 11/06/2002, p.88-9

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