Browsing by Author "Wilkol, M."
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Publication Ozonated DI-water for clean chemical oxide growth
Proceedings paper1999, Ultra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon, 21/09/1998, p.77-80Publication Ozonated DI-water for clean chemical oxide growth
Oral presentation1998, 4th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS