Browsing by Author "William, B. James"
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Publication Defect detection and classification on imec iN5 node BEoL test vehicle with multibeam scanning electron microscope
;Neumann, Jens Timo ;Srikantha, Abhilash ;Huethwohl, Philipp ;Lee, KeumsilWilliam, B. JamesJournal article2023, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (22) 2, p.Art. 021009