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Browsing by Author "William, B. James"

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    Defect detection and classification on imec iN5 node BEoL test vehicle with multibeam scanning electron microscope

    Neumann, Jens Timo
    ;
    Srikantha, Abhilash
    ;
    Huethwohl, Philipp
    ;
    Lee, Keumsil
    ;
    William, B. James
    Journal article
    2023, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (22) 2, p.Art. 021009

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