Defect detection and classification on imec iN5 node BEoL test vehicle with multibeam scanning electron microscope

Neumann, Jens Timo; Srikantha, Abhilash; Huethwohl, Philipp; Lee, Keumsil; William, B. James; Korb, Thomas; Foca, Eugen; Garbowski, Tomasz; Boecker, Daniel; Das, Sayantan; Halder, Sandip

doi:10.1117/1.jmm.22.2.021009

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Defect detection and classification on imec iN5 node BEoL test vehicle with multibeam scanning electron microscope

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2023

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https://doi.org/10.1117/1.jmm.22.2.021009

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JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3

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Defect detection and classification on imec iN5 node BEoL test vehicle with multibeam scanning electron microscope

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