Publication:

Defect detection and classification on imec iN5 node BEoL test vehicle with multibeam scanning electron microscope

Date

2023
Journal article
https://doi.org/10.1117/1.JMM.22.2.021009
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dc.contributor.authorNeumann, Jens Timo
dc.contributor.authorSrikantha, Abhilash
dc.contributor.authorHuethwohl, Philipp
dc.contributor.authorLee, Keumsil
dc.contributor.authorWilliam, B. James
dc.contributor.authorKorb, Thomas
dc.contributor.authorFoca, Eugen
dc.contributor.authorGarbowski, Tomasz
dc.contributor.authorBoecker, Daniel
dc.contributor.authorDas, Sayantan
dc.contributor.authorHalder, Sandip
dc.contributor.imecauthorDas, Sayantan
dc.contributor.imecauthorHalder, Sandip
dc.contributor.orcidimecDas, Sayantan::0000-0002-3031-0726
dc.contributor.orcidimecHalder, Sandip::0000-0002-6314-2685
dc.date.accessioned2024-03-04T13:19:48Z
dc.date.available2024-01-08T17:19:01Z
dc.date.available2024-03-04T13:19:48Z
dc.date.embargo9999-12-31
dc.date.issued2023
dc.identifier.doi10.1117/1.JMM.22.2.021009
dc.identifier.issn1932-5150
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/43359
dc.publisherSPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
dc.source.beginpageArt. 021009
dc.source.endpageN/A
dc.source.issue2
dc.source.journalJOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3
dc.source.numberofpages10
dc.source.volume22
dc.title

Defect detection and classification on imec iN5 node BEoL test vehicle with multibeam scanning electron microscope

dc.typeJournal article
dspace.entity.typePublication
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