Browsing by Author "William, James B."
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Publication Defect detection and classification on imec iN5 node BEoL test vehicle with MultiSEM
;Neumann, Jens Timo ;Srikantha, Abhilash ;Huthwohl, Philipp ;Lee, KeumsilWilliam, James B.Proceedings paper2022, Conference on Metrology, Inspection, and Process Control XXXVI Part of SPIE Advanced Lithography and Patterning Conference, FEB 24-MAY 27, 2022, p.Art. 1203501