Defect detection and classification on imec iN5 node BEoL test vehicle with MultiSEM

Neumann, Jens Timo; Srikantha, Abhilash; Huthwohl, Philipp; Lee, Keumsil; William, James B.; Korb, Thomas; Foca, Eugen; Garbowski, Tomasz; Boecker, Daniel; Das, Sayantan; Halder, Sandip

doi:10.1117/12.2619766

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Defect detection and classification on imec iN5 node BEoL test vehicle with MultiSEM

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2022

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https://doi.org/10.1117/12.2619766

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Proceedings of SPIE

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1313 since deposited on 2022-09-08

Acq. date: 2025-12-11

Defect detection and classification on imec iN5 node BEoL test vehicle with MultiSEM

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