Publication:

Defect detection and classification on imec iN5 node BEoL test vehicle with MultiSEM

Date

2022
Proceedings Paper
https://doi.org/10.1117/12.2619766
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dc.contributor.authorNeumann, Jens Timo
dc.contributor.authorSrikantha, Abhilash
dc.contributor.authorHuthwohl, Philipp
dc.contributor.authorLee, Keumsil
dc.contributor.authorWilliam, James B.
dc.contributor.authorKorb, Thomas
dc.contributor.authorFoca, Eugen
dc.contributor.authorGarbowski, Tomasz
dc.contributor.authorBoecker, Daniel
dc.contributor.authorDas, Sayantan
dc.contributor.authorHalder, Sandip
dc.contributor.imecauthorDas, Sayantan
dc.contributor.imecauthorHalder, Sandip
dc.contributor.orcidimecDas, Sayantan::0000-0002-3031-0726
dc.contributor.orcidimecHalder, Sandip::0000-0002-6314-2685
dc.date.accessioned2023-04-27T15:30:31Z
dc.date.available2022-09-08T02:39:18Z
dc.date.available2023-04-27T15:30:31Z
dc.date.embargo9999-12-31
dc.date.issued2022
dc.identifier.doi10.1117/12.2619766
dc.identifier.eisbn978-1-5106-4982-8
dc.identifier.isbn978-1-5106-4981-1
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40389
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpageArt. 1203501
dc.source.conferenceConference on Metrology, Inspection, and Process Control XXXVI Part of SPIE Advanced Lithography and Patterning Conference
dc.source.conferencedateFEB 24-MAY 27, 2022
dc.source.conferencelocationSan Jose
dc.source.journalProceedings of SPIE
dc.source.numberofpages10
dc.source.volume12053
dc.title

Defect detection and classification on imec iN5 node BEoL test vehicle with MultiSEM

dc.typeProceedings paper
dspace.entity.typePublication
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