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Browsing by Author "Williams, Alvina"

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    Characterization of a projection lens using the extended Nijboer-Zernike approach

    Dirksen, Peter
    ;
    Braat, Joseph
    ;
    De Bisschop, Peter  
    ;
    Janssen, Augustus J.E.M.
    ;
    Juffermans, Casper
    Proceedings paper
    2002, Optical Microlithography XV, 5/03/2002, p.1392-1399

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