Browsing by Author "Williamson, Lance"
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Publication Directed self-assembly process integration – fin patterning approaches and challenges
Proceedings paper2014, Advances in Resist Materials and Processing Technology XXXI, 23/02/2014, p.90510MPublication Grazing-incidence small angle x-ray scattering studies of nanoscale polymer gratings
Proceedings paper2015, Metrology, Inspection, and Process Control for Microlithography XXIX, 22/02/2015, p.94241NPublication Impact of BCP asymmetry on DSA patterning performance
Proceedings paper2015, Alternative Lithographic Technologies VII, 22/02/2015, p.943215Publication Line Edge Roughness on Directed Self Assembly: Impact of process conditions
Publication The role of guide stripe chemistry in block copolymer directed self assembly
Proceedings paper2015, Advances in Patterning Materials and Processes XXXII, 22/02/2014, p.94250WPublication Tuning the strength of chemical patterns for directed self-assembly of block copolymers
Proceedings paper2014, Alternative Lithographic Technologies VI, 23/02/2014, p.90491B