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Directed self-assembly process integration – fin patterning approaches and challenges
Publication:
Directed self-assembly process integration – fin patterning approaches and challenges
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Date
2014
Proceedings Paper
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27794.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Sayan, Safak
;
Chan, BT
;
Gronheid, Roel
;
Van Roey, Frieda
;
Kim, Min-Soo
;
Williamson, Lance
;
Nealey, Paul
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1909
since deposited on 2021-10-22
Acq. date: 2025-12-11
Citations
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Views
1909
since deposited on 2021-10-22
Acq. date: 2025-12-11
Citations