Browsing by Author "Wittebrood, F."
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Publication 22nm node imaging and beyond: a comparison of EUV and ArFi double patterning
Proceedings paper2010, International Symposium on Lithography Extensions, 20/10/2010Publication Single exposure EUV block downscaling for metal pitches below 32nm
Proceedings paper2017, 15th Fraunhofer IISB Lithography Simulation Workshop, 21/09/2017