Browsing by Author "Witters, H."
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Publication Properties of HfTaxOy high-k layers deposited by ALCVD
;Zhao, Chao ;Rittersma, Z.M. ;van Berkum, J.G.M. ;Snijders, J.H.M. ;Hendriks, A.Breimer, P.Proceedings paper2005, Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS: New Materials, Processes, and Equipment, 15/05/2005, p.133-140