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Browsing by Author "Wong, Evelyn"

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    Interim investigation of CD-SEM resist shrinkage in 193nm lithography

    Hoffmann, Thomas
    ;
    Storms, Greet
    ;
    Vandenbroeck, Nadia  
    ;
    Delvaux, Christie  
    ;
    Ercken, Monique  
    Oral presentation
    2002, 3rd European Advanced Equipment Control / Advanced Process Control Conference

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