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Browsing by Author "Wong, T.K.S."

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    Simulation and measurement of the capacitance benefit of air gap interconnects for advanced technology nodes

    Kumaresan, Vishnuvarthan
    ;
    Wilson, Chris  
    ;
    Verdonck, Patrick  
    ;
    Van Besien, Els  
    Journal article
    2014, Microelectronic Engineering, 120, p.90-94

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