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Simulation and measurement of the capacitance benefit of air gap interconnects for advanced technology nodes
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Simulation and measurement of the capacitance benefit of air gap interconnects for advanced technology nodes
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Date
2014
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kumaresan, Vishnuvarthan
;
Wilson, Chris
;
Verdonck, Patrick
;
Van Besien, Els
;
Lazzarino, Frederic
;
Truffert, Vincent
;
Boemmels, Juergen
;
Tokei, Zsolt
;
Wong, T.K.S.
Journal
Microelectronic Engineering
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1850
since deposited on 2021-10-22
Acq. date: 2025-12-16
Citations
Metrics
Views
1850
since deposited on 2021-10-22
Acq. date: 2025-12-16
Citations