Browsing by Author "Wouters, Kristof"
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Publication A comb based in-plane SiGe capacitive accelerometer for above-IC integration
Proceedings paper2010, 21st Micromechanics and Microsystems Europe Workshop - MME, 26/09/2010, p.212-215Publication An in-plane SiGe differential capacitive accelerometer for above-IC integration
Journal article2011-07, Journal of Micromechanics and Microengineering, (21) 7, p.74011Publication Determination of mechanical and swelling properties of EPOCLAD negative photoresist
Proceedings paper2010, 21st Micromechanics and Microsystems Europe Workshop - MME, 26/09/2010, p.84-87Publication Determining physical properties of EpoClad negative photoresist for use in MEMS applications
Journal article2011, Journal of Micromechanics and Microengineering, (21) 7, p.74001