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Articles
Determining physical properties of EpoClad negative photoresist for use in MEMS applications
Publication:
Determining physical properties of EpoClad negative photoresist for use in MEMS applications
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Date
2011
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Gijsenbergh, Pieter
;
Wouters, Kristof
;
Vanstreels, Kris
;
Puers, Robert
Journal
Journal of Micromechanics and Microengineering
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1874
since deposited on 2021-10-19
Acq. date: 2025-12-10
Citations
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Views
1874
since deposited on 2021-10-19
Acq. date: 2025-12-10
Citations