Browsing by Author "Wu, Hengpeng"
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Publication All track directed self-assembly of block copolymers: process flow and origin of defects
Proceedings paper2012, Alternative Lithographic Technologies IV, 12/02/2012, p.83230DPublication Determination of critical parameters for control of directed self-assembly of block copolymers using frequency multiplication
Oral presentation2012, Conference on Photopolymer Science and TechnologyPublication Investigation of cross-linking poly(methyl methacrylate) as a guiding material in block copolymer directed self-assembly
Proceedings paper2014, Advances in Patterning Materials and Processes XXXI, 23/02/2014, p.90510KPublication Manufacturability of dense hole arrays with directed self-assembly using the CHIPS flow
; ; Publication Patterning sub-25nm half-pitch hexagonal arrays of contact holes with chemo-epitaxial DSA guided by ArFi pre-patterns
Proceedings paper2015, Advances in Patterning Materials and Processes XXXII, 22/02/2015, p.94250X