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Browsing by Author "Wu, Yizhi"

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    Publication

    Exploration of a low-temperature PEALD technology to trim and smooth 193i photoresist

    Lazzarino, Frederic  
    ;
    Paolillo, Sara  
    ;
    Peter, Antony  
    ;
    De Roest, David  
    ;
    Seong, TaeGeun
    ;
    Wu, Yizhi
    Proceedings paper
    2017, Advances in Patterning Materials and Processes XXXIV, 26/02/2017, p.101460K

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