Browsing by Author "Xiong, K."
Now showing 1 - 3 of 3
- Results Per Page
- Sort Options
Publication Effect of degas before metal gate deposition on the threshold voltage
Journal article2007, Microelectronic Engineering, (84) 9_10, p.2255-2258Publication N-type VT tuning by Te ion implantation in moly-based metal gates with high-k dielectric for fully depleted devices
Proceedings paper2008, 38th European Solid-State Device Research Conference - ESSDERC, 16/09/2008, p.286-289Publication Tuning PMOS Mo(O,N) metal gates to NMOS by addition of DyO capping layer
Proceedings paper2007, Technical Digest International Electron Devices Meeting - IEDM, 10/12/2007, p.329-332