Tuning PMOS Mo(O,N) metal gates to NMOS by addition of DyO capping layer

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Author(s)

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Singanamalla, Raghunath

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O'Connor, Robert

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Veloso, Anabela

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Adelmann, Christoph

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Van Elshocht, Sven

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Paraschiv, Vasile

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Kubicek, Stefan

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De Meyer, Kristin

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Biesemans, Serge

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Metrics

1935 since deposited on 2021-10-16

Acq. date: 2025-10-23