Browsing by Author "Xu, Ping"
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Publication Mandrel-based patterning: density multiplication techniques for15nm nodes
;Bencher, Chris ;Dai, Huixiong ;Miao, Liyan ;Chen, Yongmei ;Xu, PingChen, YijianProceedings paper2011, Optical Microlithography XXIV, 27/02/2011, p.79730K