Publication:

Mandrel-based patterning: density multiplication techniques for15nm nodes

Date

2011
Proceedings Paper
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Author(s)

Bencher, Chris
;
Dai, Huixiong
;
Miao, Liyan
;
Chen, Yongmei
;
Xu, Ping
;
Chen, Yijian
;
Oemardani, Shiany
;
Sweis, Jason
;
Wiaux, Vincent  
;
Hermans, Jan  
;
Chang, Li-Wen
;
Bao, Xinyu
;
Yi, He
;
Wong, H.-S. Philippe

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1910 since deposited on 2021-10-19
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1910 since deposited on 2021-10-19
Acq. date: 2026-10-13

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