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Browsing by Author "Xu, T."

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    Process control & integration options of RMG Technology for aggressively scaled devices

    Veloso, Anabela  
    ;
    Higuchi, Yuichi
    ;
    Chew, Soon Aik
    ;
    Devriendt, Katia  
    ;
    Ragnarsson, Lars-Ake  
    Proceedings paper
    2012, Symposium on VLSI Technology - VLSIT, 12/06/2012, p.33-34
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    Siconi for bulk FinFET (BFFT) recess etch

    Cockburn, Andrew  
    ;
    Gravey, Virginie
    ;
    Xu, T.
    ;
    Diehl, D.
    ;
    Redolfi, Augusto  
    Oral presentation
    2011, AMAT ET Conference

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