Publication:

Process control & integration options of RMG Technology for aggressively scaled devices

Date

2012
Proceedings Paper
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Author(s)

Veloso, Anabela  
;
Higuchi, Yuichi
;
Chew, Soon Aik
;
Devriendt, Katia  
;
Ragnarsson, Lars-Ake  
;
Sebaai, Farid  
;
Schram, Tom  
;
Brus, Stephan  
;
Vecchio, Emma  
;
Kellens, Kristof  
;
Rohr, Erika
;
Eneman, Geert  
;
Simoen, Eddy  
;
Cho, Moon Ju
;
Paraschiv, Vasile  
;
Crabbe, Yvo
;
Shi, Xiaoping
;
Tielens, Hilde  
;
Van Ammel, Annemie  
;
Dekkers, Harold  
;
Favia, Paola  
;
Geypen, Jef  
;
Bender, Hugo  
;
Phatak, Anup
;
del Agua Borniquel, Jose Ignacio  
;
Xu, K.
;
Allen, M.
;
Liu, C.
;
Xu, T.
;
Yoo, W.S.
;
Thean, Aaron  
;
Horiguchi, Naoto  

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