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Browsing by Author "Xue, P."

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    The effects of vacuum-ultraviolet radiation on defects in low-k organosilicate glass

    Xue, P.
    ;
    Pei, D.
    ;
    Zheng, H.
    ;
    Li, W.
    ;
    Afanasiev, Valeri  
    ;
    Baklanov, Mikhaïl
    ;
    de Marneffe, Jean-Francois  
    Journal article
    2016, Thin Solid Films, 616, p.23-26

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