Browsing by Author "Yakunin, Sergey"
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Publication Advancing X-ray metrology for routine thin film analysis
Proceedings paper2018, 13th International MicroNanoConference - iMNC, 11/12/2018Publication Laboratory-based 3D X-ray standing-wave analysis of nanometre-scale gratings
Journal article2024, JOURNAL OF APPLIED CRYSTALLOGRAPHY, (57) 5, p.1288-1298