Laboratory-based 3D X-ray standing-wave analysis of nanometre-scale gratings

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Author(s)

Matveevskii, Ksenia

;

Nikolaev, Konstantin V.

;

Fallica, Roberto

;

Beckers, Detlef

;

Gateshki, Milen

;

Kharchenko, Alexander

;

;

Rogachev, Alexander

;

Yakunin, Sergey

;

Ackermann, Marcelo

;

Makhotkin, Igor A.

Journal

JOURNAL OF APPLIED CRYSTALLOGRAPHY

Metrics

27 since deposited on 2024-11-24

Acq. date: 2025-10-23

148 since deposited on 2024-11-24

Acq. date: 2025-10-23